Process for manufacturing a DMOS transistor

ABSTRACT

In the processes known so far, for a trench-shaped structure the doping of the side walls is coupled to the doping of the floor region.  
     According to the new process, it is possible in the case of a trench-shaped structure to set the doping of the side walls independently from the doping of the floor region. Furthermore, it is also possible to set different dopings among the side walls. For DMOS transistors, this allows high breakthrough voltages to be generated even with low turn-on resistances, and the space requirement, in particular with regard to driver structures, can be reduced.

BACKGROUND

[0001] 1. Field of the Invention

[0002] The present invention relates to a process for manufacturing aDMOS transistor in accordance with the preamble of Patent claim 1.

[0003] 2. Description of the Related Technology

[0004] Such a process is known from the printed publication U.S. Pat.No. 5,539,238. Here, a DMOS transistor with a deep trench structure isgenerated, with the doped regions adjoining the side walls and the baseregion representing the so-called drift zone of the transistor. Due tothe partially vertical implementation of the drift zone along the sidewalls of the trench, the length of the transistor can be reduced. Thedisadvantage in this process is that for an applied blocking voltageinhomogeneities in the course of the potential occur on the edges of thetrench structure, which cause an undesirable reduction in the transistorblocking voltage. Furthermore, the total length of the drift region isnot decreased but only subdivided into a vertical and a lateral share,that is, the specific turn-on resistance Rsp=Rdson/region is notdecreased, rather the side walls can only be doped insufficiently; andthe specific turn-on resistance, and thus the surface area used by thetransistor, are increased.

[0005] A further process is known from the printed publication EP 0 837509 A1. Here, a self-adjusted drift region is generated in a DMOStransistor below a LOCOS oxide. The disadvantage is that the doping ofthe drift region is introduced before oxidation and that the share ofthe doping agent diffusing into the oxide can be determined with someimprecision only. In addition, the high temperature load duringoxidation causes a wide distribution of the doping agent, which in turnleads to a higher imprecision in the doping agent concentration.Furthermore, a large silicon thickness is required underneath the oxidein order to increase the blocking voltage by means of the so-called“RESURF” effect. Overall, the process scatterings increase the scatterin the electrical parameters of the transistor.

[0006] One development aim in the area of DMOS transistors is tomanufacture space-saving structures which, for an applied blockingvoltage, feature low field strengths, in order to avoid a generation ofload carriers that lead to a breakthrough within the component. Afurther aim in the development of DMOS transistors is to achieve a lowspecific turn-on resistance, Rsp, in order to reduce the spatial arearequired by such an integrated circuit in the case of integratedcircuits where DMOS transistors take up a significant part of the totalchip surface area.

SUMMARY OF THE INVENTION

[0007] The present invention is based on the task to state a process bymeans of which DMOS transistors can be provided on a compact surfacearea for high blocking voltages.

[0008] This first above-mentioned task is solved by the characterizingfeatures of Patent claim 1. Advantageous forms of embodiment are thesubject of sub-claims.

[0009] In accordance with the above, the invention essentially consistsin that a trench-shaped structure is generated in a DMOS transistorwhere, by selecting the doping agent profile within the region of thetrench-shaped structure, a high breakthrough voltage for a low lateralexpansion of the DMOS transistor is achieved. To this end, in asemiconductor body of a first conductivity type, which features asurface layer in which a source region and a drain region of a secondconductivity type, and a first well region of a first conductivity typethat includes the source region, and a second well region of a secondconductivity type that includes the drain region, are formed, and inwhich a body region is formed between the first well region and thesecond well region, and where on the surface of a semiconductor body agate region is formed, which—starting at the source region—extendsacross the first well region, and which—starting at the surface of thesemiconductor body—generates a trench-shaped structure in a part of thesurface layer. Furthermore, in the floor region of the trench-shapedstructure, a doping of a second conductivity type with a firstconcentration, and in the source-end side wall of the trench-shapedstructure a doping of the second conductivity type with a secondconcentration, and in the drain-end side wall of the trench-shapedstructure a doping of the second conductivity type with a thirdconcentration, are generated.

[0010] An essential advantage of the new process is that, due to thedifferent concentration of the doping agent in the source-end side wallcompared to the drain-end side wall in connection with the doping agentconcentration in the floor region of the trench-shaped structure, whichtogether define the drift range of the transistor, a simple optimizationwithin a parameter field essentially determined by the specific turn-onresistance Rsp, breakthrough voltage Vbreak, and the size and shape ofthe SOA (safe-operation-area), can be carried out. In particular fordriver structures it thus becomes possible to generate transistors witha compact total area. Furthermore, the RESURF effect can be optimizedparticularly advantageously with regard to: starting point, usingdifferent doping agent concentrations; strength, by means of anadjustable vertical distribution of the potential gradient for theapplied blocking voltage. As doping is effected only after siliconetching with a low implantation energy, and no thick LOCOS-oxide with ahigh temperature load is generated next, spatially highly doped regionscan be generated along a short vertical route underneath the floor ofthe trench-shaped structure; these spatially highly doped regions form aburied current path with low resistance. As the doping of the floor—bymeans of the RESURF-effect in connection with the doping course in thesource-end side wall—has an essential influence on the breakthroughvoltage in a blocking as well as in a switched on condition, whilst thedrain-end doping agent course has an essential influence on the turn-onresistance Rdson, an adaptation of the doping profiles along thetrench-shaped structure to the electrical requirements is particularlyadvantageous. Furthermore, the space used by the transistors is reducedas, due to the self-adjustment in connection with a simultaneouslyreduced temperature load compared with a LOCOS oxidation, the processscattering of the doping agent profiles introduced into thetrench-shaped structure are reduced.

[0011] In a further embodiment of the process, it is advantageous toexpand the region of the second well in the direction of the source andto generate the trench-shaped structure partially or wholly within theregion of the second well. The further the second well extends in thedirection of the source, the more the specific turn-on resistance Rsp isreduced, as the floor region of the trench-shaped structure and thesecond well feature the same doping polarity. It is advantageous here,underneath the trench-shaped structure in the vicinity of the source-endfloor region between the second well and the body region, to increasethe breakthrough voltage by forming a lateral PN junction utilizing theRESURF effect. As the body region concentration is lower than that ofthe two well dopings, the spatial charge zone expands into the bodyregion when blocking voltage is applied.

[0012] In a further embodiment of the process, an extension region isgenerated underneath the drain-doping region, which extension regioncompletely encloses the drain region, with the doping of the extensionregion being of the same conductivity type, but featuring a lowerconcentration than the drain region. In addition to the suppression of adrain-end breakthrough, the reduction of the resistance within thedrain-end side wall region reduces the specific turn-on resistance Rsp.The specific turn-on resistance Rsp is reduced particularly strongly ifthe extension region and/or the drain-end region connect immediately tothe drain-end side wall of the trench-shaped structure.

[0013] Investigations carried out by the applicant have shown that inthe breakthrough region of the transistor, by means of a distancebetween the drain-end side wall of the trench-shaped structure and theextension region and/or the drain-end—which is preferably between 0.5 μmand 4.0 μm—, a balancing can be achieved. Here, by means of theadditional drain-end resistance causing a voltage drop, a localexcessive increase in the current density is suppressed. In particularin connection with a clamp controller, advantageous ESD protectivestructures can be produced by means of such transistors.

[0014] In a further development of the process, in the side walls and inthe floor region of the trench-shaped structure, a higher doping agentconcentration than in the body region is generated, in order to increasethe maximum blocking voltage by means of the RESURF effect, and also toreduce the specific turn-on resistance Rsp.

[0015] In another development of the process, the same doping agentconcentration is generated in the source-end side wall as well as in thedrain-end side wall of the trench-shaped structure. This simplifies theintroduction of the doping agent and increases the specific turn-onresistance Rsp by only a minor degree, as the individual doping agentconcentrations add up, if the extension region and the drain regionstart immediately on the side wall of the trench-shaped structure, andif the introduction depth of the drain-end doping lies within the rangeof the trench-shaped structure. Furthermore, it is advantageous—inparticular with regard to deep trench-shaped structures—to generate ahigher doping agent concentration in the drain-end side wall than in thesource-end side wall, in order to obtain a lower turn-on resistance Rsp.

[0016] Investigations by the applicant with regard to different dopingagent concentrations for wall and floor have shown that it isadvantageous, if the aspect ratio of the trench-shaped structure isabove 0.5, and features a trench-shaped structure with a width in arange between 0.5 μm and 4.0 μm. In order to suppress excessive fieldstrength increases on the edges of the trench-shaped structure, it isadvantageous to generate inclined side walls, that is, the trench-shapedstructure features a narrower width in the floor region than on thesurface. The generation of the trench-shaped structure can be carriedout by means of a dry etching process such as, for example, a shallowtrench process (STI), and filled up with an isolating material such as aCVD-oxide or nitride, and planarized by the use of a CMP process.

[0017] In another development of the process, the trench-shapedstructure is generated by means of a V trench etching process and filledup in a following LOCOS oxidation which, due to the lower temperatureload, is preferably produced by high pressure oxidation. The doping ofthe side walls and the floor is carried out prior to the LOCOSoxidation, with the infed dosage of doping agents being increased bythat proportion which is diffused into the oxide during oxidation.

[0018] In a further development of the process, the DMOS transistor isgenerated in the surface layer of a waver with an isolating intermediatelayer. It is advantageous here, if the thickness of the residual surfacelayer underneath the trench-shaped structure is between one half and afactor 5 of the depth of the trench-shaped structure. It is furthermoreadvantageous, if the drain-end region and/or extension region, the bodyregion and the two well regions as well as the source region connectimmediately to the isolating intermediate layer in order to suppress theparasitical capacities. A further advantage is that the required layerthickness of the surface layer is within a range of just a few um, asthe formation of a highly doped buried channel connecting to the floorof the trench-shaped structure features a low vertical extension only.

[0019] Investigations by the applicant have shown that the DMOStransistors produced by the process in accordance with the invention, inparticular when using a silicon wafer with an isolating intermediatelayer, are especially suitable for the manufacture of high blockingintegrated circuits featuring an output driver for driving inductiveloads.

BRIEF DESCRIPTION OF THE FIGURES

[0020] In the following, the process according to the invention is to beexplained in more detail by means of embodiment examples and inconnection with several block diagrams. The figures below show:

[0021]FIG. 1 a cross-section of a DMOS transistor with a trench-shapedstructure in the drift region, and

[0022]FIG. 2a a cross-section of the doping layers for a DMOS transistorbetween the gate and drain regions, and

[0023]FIG. 2b a potential course for the DMOS transistor from FIG. 2a,with a blocking voltage applied.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] Table 1 shows a process sequence for manufacturing DMOStransistors, into which—based on the BCDMOS process sequence known fromthe current state of the art—the process steps 4 to 8 are additionallyinserted. This generates a trench-shaped structure between the sourceand drain regions of N- or P-DMOS transistors, with a freely selectabledoping in the respective side wall and a separately selectable doping inthe floor region. With such process sequences, it is possible to produceat the same time N- and P-DMOS transistors, bipolar and complementaryMOS transistors for an integrated circuit.

[0025] Table 1: Standard DMOS Module:

[0026] 1. Material start: Silicon wafer with an isolating intermediatelayer

[0027] 2. Formation of the P-well (mask step)

[0028] 3. Formation of the N-well (self-adjusted to P-well)

[0029] 4. FORMATION OF THE WINDOW FOR A TRENCH-SHAPED STRUCTURE (MASKSTEP)

[0030] 5. TILT-IMPLANTATION (FOR SIDE WALL)

[0031] 6. FORMATION OF A TRENCH-SHAPED STRUCTURE BY MEANS OF ANISOTROPESILICON ETCHING (STI PROCESS) (MASK STEP)

[0032] 7. FORMATION OF A PROTECTIVE LAYER BY OXIDATION/DIFFUSION OF THEIMPLANTED DOPING

[0033] 8. IMPLANTATION VERTICAL AND TILT (FOR FLOOR- AND DRAIN-END SIDEWALL) (MASK STEP)

[0034] 9. Formation of component boxes by means of a deep trench process(mask step)

[0035] 10. Filling of the trench windows, or the trench-shapedstructure, with CVD-OXIDE

[0036] 11. CMP-planarization

[0037] 12. Extension-implantation (mask step)

[0038] 13. Threshold voltage implantation (mask step)

[0039] 14. Gate oxidation

[0040] 15. Gate poly separation and structuring (mask step)

[0041] 16. LDD implantation (mask step)

[0042] 17. Source/Drain implantation (mask step)

[0043] 18. BPSG-separation

[0044] 19. Etching of contact windows (mask step)

[0045] 20. Metal1 (mask step)

[0046] 21. Via-etching (mask step)

[0047] 22. Metal2 (mask step)

[0048] The starting point for the manufacture of a DMOS transistor inaccordance with the process sequence shown is a silicon wafer with anisolating intermediate layer (SOI wafer). Following the definition ofthe wells, a window is defined by means of mask step 4, through whichwindow the doping for the side walls of the structure to be generated isimplanted by means of a subsequent step 5. In the following step 6, atrench-shaped structure is produced by silicon etching, and then, in afollow-on step 7, the side walls are lined with a protective layer. In afollow-on step 8, a two-stage implantation for doping the floor- and thedrain-end side wall is carried out. As the process steps 4 to 8 arecarried out with a single mask, the implantations thus introduced areself-adjusted. The filling of the trench-shaped structure is implementedjointly with the filling of the trench structures. In further processsteps, the gate regions and the source/drain regions are defined andconnected to the printed circuit path system by means of a contactwindow process. Due to the use of an SOI wafer with a trench isolation,the transistors produced are located in individual component boxesisolated from each other.

[0049] In the following, FIG. 1 is explained; this shows a block diagramwith a cross-section of an N-DMOS transistor 100 with a trench-shapedstructure. The manufacture of an N-DMOS transistor 100 is implemented bymeans of a process sequence (not shown here) within a semiconductor body5 featuring an isolating intermediate layer 4. To this end, in a firstprocess step, a P well region 20 and an N well region 19, with anintermediate P body region 18, are produced in the semiconductor body.In a subsequent process step, within a protective layer consisting forexample of a nitride and/or oxide, a mask step is used to produce awindow for the introduction of a doping agent with negative polaritysuch as arsenic or phosphor. In order to increase the drain-endconcentration of the doping agent, the implantation is made at a tiltangle of 60 degrees, for example. In a following process step, atrench-shaped structure is produced by means of anisotrope siliconetching, for example by means of STI etching, and the doping agent inthe floor region is removed completely. In a following process step, ascattering oxide is produced whose thickness is sufficient to suppresseffectively the doping agent infeed by means of a second implantation inthe floor region of the trench-shaped structure. As the side walls areonly slightly inclined, oxide thicknesses within the range of just a few100 A suffice for this purpose. Due to the oxidation step, the dopingagent remaining from the first implantation step is simultaneouslydiffused, with a first region 40 with a first concentration forming atthe source end, and a second region 60 with a second concentrationforming at the drain end. In a following process step, in a secondimplantation step which is carried out in two stages, a doping agentwith a negative polarity is introduced. Here, in the first stage, a partof the total dosage is introduced vertically, that is, only into a floorregion 50, and in the second stage the remaining dosage is introduced ata tilt angle of 60 degrees, for example, so that the concentrationlevels in the drain-end region of the floor 50 and in the drain-end sidewall 60 are increased even further. In summary, following the twoimplantation steps, the region 60 features a high concentration, theregion 50 a medium concentration, and the region 40 a lowerconcentration, of a doping agent with negative polarity. In a followingprocess step, the trench-shaped structure is filled with an isolatingmaterial, with a CVD oxide 65 for example, and the surface of thetrench-shaped structure is planarized by a CMP step. In severalfollowing process steps that are immanent in known MOS processarchitectures, a gate connection G with a gate oxide 30 and apoly-silicon layer 35 is produced. Furthermore, in subsequent processsteps that are also known, a source connection S with a highly dopedregion 10 and a drain connection D with a highly doped region 80, whichfeature a negative polarity, as well as a body connection B with ahighly doped region 15 featuring a positive polarity, is produced. Also,below the drain connection D, an extension region 70 with negativepolarity is produced, whose concentration is lower than theconcentration in the region 80. Furthermore, the extension region 70 andthe drain region 80 connect immediately to the drain-end side wall ofthe trench-shaped structure so that the concentrations of regions 60,70, 80 add up along the side wall. Additionally, the region of thesource connection 10 is enclosed by the P well region 20, with the Pwell being separated from the N well by the P body region in a lateraldirection. Also,-the P well region 20 and the N well region 19 borderdirectly onto the isolating intermediate layer 4.

[0050] The particular advantage in the process sequence shown is that itcan be used to produce jointly N-DMOS as well as P-DMOS transistors,with the temperature load during the production process beingsignificantly reduced due to the trench-shaped structure being producedby dry etching. In this way, spatially delimited regions withdifferently high dopings can be produced along the trench-shapedstructure parts, by means of which spatially delimited regions it isthen easy to optimize the electrical parameters of the DMOS transistor.In particular, with the low specific turn-on resistances Rsp and thesimultaneous high blocking voltages, large current carrying capacitieson a compact surface area can be produced, as a.o. the voltage dropwithin the drift range of the transistor reduces. Furthermore, by addingepitaxy layers and/or buried layers, it is possible to isolate the DMOStransistors against each other using just a few additional processsteps, if wafers without an isolating intermediate layer are used.Furthermore, due to the formation of the N well in the drift rangeregion of the transistor, the saturation current ldsat is increased.Additionally, the blocking voltage increases as the N well 19 region, incomparison to the extension region 70, features a reduced doping agentconcentration and is separated from the P well by the lowly doped P bodyregion 18. In this way, high blocking voltages are achieved even in aturned-on condition, but with the specific turn-on resistance Rspremaining low.

[0051]FIG. 2a shows a cross-section view of the doping layers of thepart between gate region 35 and drain region 80 of the N-DMOS transistor100 from FIG. 1. The N-DMOS 100 is produced by a process sequence asexplained in connection with the drawings of FIG. 1, with—in extension—apassivizing layer made of oxide 105 being applied to the surface of thesemiconductor structure. Furthermore, the layer 105 features a windowfor the gate connection G as well as a window for the drain connectionD, which are both filled by a metal. Moreover, in the regions 18, 19,20, 35, 50, 70, and 80 the polarity of the doping agent is representedby the direction of the hatching. Here, those regions which feature anegative polarity are hatched by lines from the top left to the bottomright, and those regions which feature a positive polarity are hatchedby lines from the top right to the bottom left. Furthermore, the levelof doping agent concentration in the respective region is represented bythe density of the hatching. Furthermore, the N well 19 region includesthe extension region 70, with the N well 19 region and the region of Pwell 20 featuring comparable doping agent concentration levels.Moreover, the P body region features a lower doping agent concentrationin comparison to the wells. Also, underneath the trench-shaped structurein the PN junction, a region with a lateral component is produced whichis located between the P body region 18 and the N well region 19.

[0052]FIG. 2b shows the potential course for the transistor illustratedin FIG. 2a, with a blocking voltage applied, just ahead of thebreakthrough. Here, the family of the individual potential linesrepresents the potential course between the channel region underneaththe gate oxide 30 and the region of drain 70, 80, with the location ofthe highest field strength being represented by the location with thehighest density of potential lines. Here it becomes clear that thetransistor features an even distribution of the potential lines withinthe drift range, with the RESURF effect being reinforced in particularby the lateral formation of the PN junction below the trench-shapedstructure between the P body and the N well. In particular, the regionof the source-end side wall in the trench-shaped structure is preferablycleared by the formation of a spatial load zone, so that the RESURFeffect already starts at low voltages and field strength peaks areavoided. Due to the even distribution of the potential lines within thedrift range, high blocking voltages are achieved whose height isessentially determined by the concentrations of the doping agents in theN well region 18 and P body region 19. Furthermore, due to the highconcentration of the doping agent—in particular in the drain-end regionof the trench-shaped structure—in connection with the N well, thecurrent carrying capacity ldsat of the DMOS transistor is increased andthe specific turn-on resistance is reduced. This reduces the regionrequirement in particular for driver applications with high currents andhigh voltages.

[0053] A further advantage is the easy transfer of the new process towafers featuring an isolating intermediate layer such as SOI wafers, forexample. The vertically delimited highly doped regions below thetrench-shaped structure reduce the thickness of the surface layer, withthe formation of a lateral PN junction below the trench-shaped structurecausing high blocking voltages to be achieved—even in a turned-oncondition. Furthermore, the underlying isolating intermediatelayer—which in general features a higher dielectric constant thansilicon reinforces the RESURF effect by means of an immanent bundling ofthe potential lines and increases the blocking voltages between drainand source by means of the low field strength within the drift range. Inparticular, the layer thickness for the surface layer located on theisolating intermediate layer can be kept low, and further componenttypes such as, for example, bipolar and MOS transistors can beintegrated together with the DMOS transistors on a single wafer—at lowcost and requiring just a few additional process steps. Additionally, inparticular due to the low thickness of the surface layer, theparasitical capacities can be suppressed by extending a part of thedoping regions—such as, for example, the P well, the N well, the P body,and the extension region—right up to the isolating intermediate layer.

What is claimed is:
 1. Process for manufacturing a DMOS transistor (100)with a semiconductor body (5), which features a surface layer with asource region (10) and a drain region (80) of a second conductivity typeand a first well region (20) of a first conductivity type, enclosing thesource region (10), and a second well region (19) of a secondconductivity type, enclosing the drain region, and with the first wellregion (20) and the second well region (19) being separated by a bodyregion (18) of a first conductivity type, and with a gate region (35)being formed on the surface of the surface layer of the semiconductorbody (5), which gate region—starting at the source region (10)—extendsacross the first well region (20), wherein starting on the surface ofthe semiconductor body (5) in the surface layer, a trench-shapedstructure is produced, and wherein in the floor region (50) of thetrench-shaped structure a doping of the second conductivity type isproduced with a first concentration value, and wherein in the source-endside wall (40) of the trench-shaped structure a doping of the secondconductivity type is produced with a second concentration value, andwherein in the drain-end side wall (60) of the trench-shaped structure adoping of the second conductivity type is produced with a thirdconcentration value.
 2. Process according to claim 1 wherein thetrench-shaped structure is produced partially or wholly within thesecond well region (19).
 3. Process according to claim 1 wherein, belowthe drain region (80), an extension region (70) of a second conductivitytype is produced which encloses the drain region (80).
 4. Processaccording to claim 2 wherein, below the drain region (80), an extensionregion (70) of a second conductivity type is produced which encloses thedrain region (80).
 5. Process according to claim 1 wherein the drainregion (80) is produced immediately adjacent to a side wall of thetrench-shaped structure.
 6. Process according to claim 4 wherein thedrain region (80) is produced immediately adjacent to a side wall of thetrench-shaped structure.
 7. Process according to claim 4 wherein theextension region (70) is produced immediately adjacent to a side wall ofthe trench-shaped structure.
 8. Process according to claim 4 wherein thedrain region (80) and the extension region (70) are produced immediatelyadjacent to a side wall of the trench-shaped structure.
 9. Processaccording to claim 4 wherein a distance between the side wall of thetrench-shaped structure and the extension region (70) is produced whichis preferably between 0.5 μm and 4.0 μm.
 10. Process according to claim1 wherein a distance between the side wall of the trench-shapedstructure and the drain region (80) is produced which is preferablybetween 0.5 μm and 4.0 μm.
 11. Process according to claim 4 wherein adistance between the side wall of the trench-shaped structure and thedrain region (80) is produced which is preferably between 0.5 μm and 4.0μm.
 12. Process according to claim 4 wherein a distance between the sidewall of the trench-shaped structure on the one hand and the extensionregion (70), and the drain region (80) on the other hand, is producedwhich is preferably between 0.5 μm and 4.0 μm.
 13. Process according toclaim 1 wherein—in the side walls and in the floor region (50) of thetrench-shaped structure—a doping is produced which features a higherconcentration level than in the body region (18).
 14. Process accordingto claim 8 wherein—in the side walls and in the floor region (50) of thetrench-shaped structure—a doping is produced which features a higherconcentration level than in the body region (18).
 15. Process accordingto claim 12 wherein—in the side walls and in the floor region (50) ofthe trench-shaped structure—a doping is produced which features a higherconcentration level than in the body region (18).
 16. Process accordingto claim 1 wherein a trench-shaped structure is produced, with thesecond and third doping agent concentration values being equal. 17.Process according to claim 8 wherein a trench-shaped structure isproduced, with the second and third doping agent concentration valuesbeing equal.
 18. Process according to claim 12 wherein a trench-shapedstructure is produced, with the second and third doping agentconcentration values being equal.
 19. Process according to claim 1wherein a trench-shaped structure is produced, with the second dopingagent concentration value being lower than the third doping agentconcentration value.
 20. Process according to claim 8 wherein atrench-shaped structure is produced, with the second doping agentconcentration value being lower than the third doping agentconcentration value.
 21. Process according to claim 12 wherein atrench-shaped structure is produced, with the second doping agentconcentration value being lower than the third doping agentconcentration value.
 22. Process according to claim 1 wherein atrench-shaped structure is produced whose aspect ratio is above 0.5 andwhose width is within a range between 0.5 μm and 4.0 μm.
 23. Processaccording to claim 1 wherein a trench-shaped structure is produced,which features a narrower width in the floor region (50) than on thesurface.
 24. Process according to claim 1 wherein the trench-shapedstructure is produced by STI etching and filled with an isolatingmaterial, preferably by means of an oxide.
 25. Process according toclaim 1 wherein the trench-shaped structure is produced by means of aLOCOS oxidation.
 26. Process according to claim 1 wherein thesemiconductor body features an isolating intermediate layer (4) belowthe surface layer, and the DMOS transistor is produced in the surfacelayer.
 27. Process according to claim 26 wherein the thickness of thesurface layer underneath the trench-shaped structure is within a rangebetween one half and a factor 5 of the depth of the trench-shapedstructure.
 28. Process according to claim 1 wherein the thickness of thesurface layer underneath the trench-shaped structure is within a rangebetween one half and a factor 5 of the depth of the trench-shapedstructure.
 29. Process according to claim 26 wherein the drain region(80) and/or the extension region (70) as well as the two well regions(19, 20), and the body region (18), and the source region (10), areproduced immediately adjacent to the isolating intermediate layer (4).